T E C H  N I C A L   D A T A
Talyscan 150

Slides

Traverse Length:

97mm x 97mm (X,Y)

Motorized column:

83mm (Z)

Straightness:

  Profile
(measured in X direction)

10mm traverse

50mm traverse

95mm traverse

Peak valley

0.25mm

0.6mm

0.9mm

SHTP (0.1% - 99.9%)

Minimum spacing:

X = 0.5mm; Y = 5mm

Maximum scanning speed:

10500mm/s

Maximum sample load:

5kg

Inductive Gauge

Laser Gauge

Vertical resolution:

0.06mm(60nm)

Vertical resolution:

1mm

Range:

2.5mm

Vertical accuracy

1mm on diffusing surface with

Principle:

FTSS inductive probe

Homogenous optical properties

Computer:

Range:

10mm

Operating System:

Window NT 4

Principle:

Laser beam triangulation

CPU:

400Mhz. Intel PII

Maximum angle of

Memory:

64Mb ECC SDRAM

Measurement surface

90 degrees